http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008076632-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F236-20 |
| filingDate | 2006-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f547659a3ddd38a252630d9df024dae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_311ddcbdfb459b3b688c1802943f25c9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6602369c5727b11b03570b310bf13f1 |
| publicationDate | 2008-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008076632-A |
| titleOfInvention | Resist protective film material and resist pattern forming method |
| abstract | A resist protective film used in an immersion lithography method in which an immersion liquid is a non-aqueous liquid medium and a method for forming a resist pattern are provided. An alkali-soluble resist protective film material for a resist protective film used in an immersion lithography method in which the immersion liquid is a non-aqueous liquid medium, which contains a polymer-like fluorine-containing compound (F) and is used for decalin. A resist protective film material having a receding angle of 40 ° or more, a method of forming a resist pattern by the immersion lithography method, the step of applying a photosensitive resist on a substrate to form a resist film on the substrate, the resist A resist protective film forming composition containing the resist protective film material is applied onto the film to form a resist protective film on the resist film, an immersion lithography process, and a developing process in this order. A resist pattern forming method for forming a pattern. [Selection figure] None |
| priorityDate | 2006-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.