http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008070271-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2006-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f8f6645abaaa0bafde73e6467239b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1a98736792de9a635977c4ac112abcb |
| publicationDate | 2008-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008070271-A |
| titleOfInvention | Sheet probe, method of manufacturing the same, and application thereof |
| abstract | To provide a sheet-like probe capable of suppressing a load applied during wafer inspection as much as possible and stably maintaining a good electrical connection state and a manufacturing method thereof. An electrode structure including an insulating layer and a contact film provided with a plurality of electrode structures disposed so as to be spaced apart from each other in a plane direction of the insulating layer and extending in a thickness direction of the insulating layer. Each of the bodies 22 is exposed from the surface of the insulating layer and further protrudes from the surface of the insulating layer, the surface electrode portion 24 exposed from the back surface of the insulating layer, and the base electrode of the surface electrode portion 24. The short-circuited portion extends through the insulating layer in the thickness direction and is connected to the back electrode portion, and the short-circuit portion has a hollow shape inside, and the back electrode portion 26 includes a hollow short-circuit portion. A through-hole that is substantially the same diameter as the shape portion and communicates with the hollow shape portion of the short-circuit portion is provided. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104777335-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101376012-B1 |
| priorityDate | 2006-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.