http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008069066-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_562de9eaba2b90ce100ddce9749e926d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-18 |
| filingDate | 2006-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aad3e57da2898fdc9d237e758f0b134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_355f8aae17a6f62fa72460c630b5d9dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a32f5ecba0d156bd392e3624650bce0 |
| publicationDate | 2008-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008069066-A |
| titleOfInvention | Artificial quartz, element, element usage method and element manufacturing method |
| abstract | An object of the present invention is to provide an artificial crystal or the like in which transmittance and reflectance are hardly changed even when an electromagnetic wave having high energy such as excimer laser light is irradiated. For example, in an element such as a diffractive optical element used for a homogenizer of a projection exposure apparatus or an optical element made of an artificial quartz crystal such as a fly-eye lens, the quartz crystal is grown by hydrothermal synthesis (step S1) and then the element During the period from processing to use (steps S2 and S4), the artificial quartz is heated at a temperature lower than the α-β transition point of the quartz (step S3). [Selection] Figure 4 |
| priorityDate | 2006-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.