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filingDate 2006-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008066640-A
titleOfInvention Tunnel-type magnetic sensing element and manufacturing method thereof
abstract PROBLEM TO BE SOLVED: To reduce the absolute value of VCR (Voltage Coefficience of Resistivity) when an insulating barrier layer is made of Ti-O, and to ensure low RA and high resistance change rate (ΔR / R). An object of the present invention is to provide a tunnel type magnetic sensing element and a method for manufacturing the same. A Pt layer is formed between a pinned magnetic layer and an insulating barrier layer. When the Pt layer 10 is interposed between the pinned magnetic layer 4 and the insulating barrier layer 5, the barrier height (potential height) and the barrier width (potential width) of the insulating barrier layer 5 change. This can reduce the absolute value of the VCR. Therefore, operational stability can be improved compared to the conventional case. In addition, the flatness of the lower interface (formation surface) of the insulating barrier layer 5 can be appropriately improved, so that a high rate of change in resistance (ΔR / R) can be obtained while maintaining a low RA. It becomes possible. [Selection] Figure 1
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