http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008060377-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_758994071efb42b565fc2c04637be131 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2006-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_876116b628eddd5295621624fec0c902 |
| publicationDate | 2008-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008060377-A |
| titleOfInvention | Cleaning agent for semiconductor cleaning |
| abstract | An object of the present invention is to provide a cleaning agent for semiconductor cleaning which does not etch metal wiring. Tetraalkylammonium hydroxide (A1), (hydroxyalkyl) trialkylammonium hydroxide (A2), bis (hydroxyalkyl) dialkylammonium hydroxide (A3) and tris (hydroxyalkyl) alkylammonium hydroxide (A4) ) Containing at least one quaternary ammonium hydroxide (A), aliphatic amine (B) and water (W) selected from the group consisting of quaternary ammonium hydroxide (A) and aliphatic Based on the weight of the amine (B) and water (W), the content of the quaternary ammonium hydroxide (A) is 0.1 to 9% by weight, and the content of the aliphatic amine (B) is 0.01 to 0.15% by weight, water (W) content is 90.9 to 99.8% by weight, and pH at 25 ° C. is 12. A semiconductor cleaning detergent is 14.0. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9074170-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021121552-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10351809-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101752684-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012506457-A |
| priorityDate | 2006-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 160.