http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008058456-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30 |
| filingDate | 2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daa88083a2a334ad2b7d9d977d8feefc |
| publicationDate | 2008-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008058456-A |
| titleOfInvention | Method for manufacturing active matrix substrate and method for manufacturing liquid crystal display device |
| abstract | An object of the present invention is to reduce the number of processes combining a dry process and photolithography etching. A first step of forming, on a substrate, a grid pattern wiring in which wiring in either the first direction or the second direction is divided at a crossing portion is formed on the substrate, and on the crossing portion and a part of the wiring. A laminated portion formed of an insulating film and a semiconductor film is formed, and a through electrode that penetrates the insulating film and is electrically connected to each of the divided wirings, and between the through electrodes across the intersection 56 Resist corresponding to a conductive layer to be connected, a switching element formed using a semiconductor film, an electrode portion connected to the semiconductor film, and a connection portion capable of electrically connecting the wiring and the semiconductor film via the electrode portion And a second step of forming 58a to 58c on the stacked portion. In the second step, the resist corresponding to the electrode portion and the through electrode among the resist is exposed with the first energy amount, and the resist corresponding to the conductive layer and the connection portion is second smaller than the first energy amount. A step of exposing with an energy amount. [Selection] Figure 8 |
| priorityDate | 2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.