| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_046f5ec590ec929b5d38191753e9cab1 |
| publicationDate |
2008-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008056975-A |
| titleOfInvention |
Deposition equipment |
| abstract |
Provided is a film forming apparatus capable of suppressing the generation of foreign matters and forming a film satisfactorily when forming a film on a substrate. A film forming apparatus emits sputtered particles for irradiating a target material with ion particles to form a film from the target material, and a movable substrate holding the substrate. A substrate holding member capable of arranging the substrate at a position where the sputtered particles can be supplied, and a predetermined member disposed between the target material and the substrate and having an opening through which at least part of the sputtered particles from the target material can pass. Is provided. The predetermined member is made of the same material as the target material. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010020092-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102297165-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009265629-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010020094-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020004104-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009287047-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210008550-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019137895-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020002395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4631940-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190098070-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11542592-B2 |
| priorityDate |
2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |