http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008047597-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c468e687b43595cae7cb1c2667678f1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2006-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c56d7e5133db849a31b9d4f828fdb91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4b9977ef5bff9e960253ab6bf0b73b4 |
| publicationDate | 2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008047597-A |
| titleOfInvention | Vapor growth equipment |
| abstract | PROBLEM TO BE SOLVED: To improve a conventional vapor phase growth apparatus, which is not sufficient from the viewpoint of safety and still needs to be improved. The present invention has been made in response to the above-described points, and provides a novel vapor phase growth apparatus with greatly improved safety. According to the vapor phase growth apparatus of the present invention, it is possible to provide a novel vapor phase growth apparatus with greatly improved safety. Specifically, the chamber 103 can be used on the spot after replacement of ClF 3 gas. It becomes possible to measure whether the ClF 3 gas concentration in the atmosphere in the (reactor) and exhaust pipe 107 is lowered to a safe concentration. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103160922-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018056419-A1 |
| priorityDate | 2006-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.