http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008046632-A

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filingDate 2007-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27940e91d1e7c81ce0213ee43e215cba
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publicationDate 2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008046632-A
titleOfInvention Manufacturing method of laminated periodic structure
abstract A polarizing beam splitter having a periodic grating structure of members is provided by a low-cost batch manufacturing technique. Forming a final periodic grating structure of a first material and a structural layer composed of a second material filling between individual features in the final periodic grating structure; Removing a second material using a chemical process; and annealing at least a portion of the first material to the third material using a second chemical process. [Selection figure] None
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priorityDate 2006-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 23.