http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008046632-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-3008 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30 |
filingDate | 2007-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27940e91d1e7c81ce0213ee43e215cba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3b2eb2cd772c37e866d1a91b9ebfb5b |
publicationDate | 2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008046632-A |
titleOfInvention | Manufacturing method of laminated periodic structure |
abstract | A polarizing beam splitter having a periodic grating structure of members is provided by a low-cost batch manufacturing technique. Forming a final periodic grating structure of a first material and a structural layer composed of a second material filling between individual features in the final periodic grating structure; Removing a second material using a chemical process; and annealing at least a portion of the first material to the third material using a second chemical process. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101581533-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010055067-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150107952-A |
priorityDate | 2006-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.