| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate |
2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6465d5c8448e582221195a83ccd350f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7c4fff0e0fecb5e30232057b32724a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117319d9441ca022455ce9347c2ae551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b8249ea5e9f8d13f92abc68c72a5173 |
| publicationDate |
2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008041719-A |
| titleOfInvention |
Intermediate transfer chamber, substrate processing system, and exhaust method for intermediate transfer chamber |
| abstract |
An intermediate transfer chamber capable of preventing defects in a substrate is provided. A substrate processing system includes a process module that performs plasma processing on a wafer, an atmospheric transfer device that takes out the wafer from a hoop, and a load lock as an intermediate transfer chamber that carries the wafer in and out. And a module 4. The load / lock module 4 includes a chamber 71 having a transfer arm 70 and a plate member 90 provided to face the wafer placement surface of the pick 74 of the transfer arm 70 and the chamber 71. A gas supply system 72 for supplying gas into the 71 and an LL / M exhaust system 73 for exhausting the chamber 71 are provided. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010045299-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011072654-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010183005-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101327671-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101130558-B1 |
| priorityDate |
2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |