http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008040182-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2006-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7fe6fc5328d4c216481d3d3a3025024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c73d832f83b05a2bba1832f671c118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98f013b9fbfadcb1479fd616f0a75342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80590cbed73651cedecb20ca3695cf4c |
| publicationDate | 2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008040182-A |
| titleOfInvention | Photosensitive resin composition for interlayer insulation film |
| abstract | Provided is a photosensitive resin composition for an interlayer insulating film which has a better profile and can form a pattern with high chemical resistance. A photosensitive resin composition for an interlayer insulating film comprising an alkali-soluble resin component (A) and a photosensitive agent (B), wherein the alkali-soluble resin component (A) is a phenolic hydroxyl group-containing structural unit (a1). ) And a crosslinkable group-containing structural unit (a2), and the sidewall angle of the resist pattern obtained from the photosensitive resin composition for interlayer insulating films is 45 degrees or more and 90 degrees The following. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759048-B2 |
| priorityDate | 2006-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 376.