http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008039814-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc6a19055ab71bfe7066169b927fae8b |
| publicationDate | 2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008039814-A |
| titleOfInvention | Lithographic resist underlayer film with inclined structure |
| abstract | PROBLEM TO BE SOLVED: To provide a resist underlayer film forming composition for a resist underlayer film for lithography, a method for forming a resist underlayer film for lithography using the resist underlayer film forming composition, and a method for forming a photoresist pattern. A resist underlayer film forming composition for use in a lithography process for manufacturing a semiconductor device comprising at least two kinds of polymers having different surface energy and number of crosslinkable functional groups. The polymer includes a first polymer having a high surface energy and a low number of crosslinkable functional groups, and a second polymer having a low surface energy and a high number of crosslinkable functional groups. Furthermore, a crosslinkable compound is included. Furthermore, an acid and / or an acid generator are included. The difference in surface energy between the polymer having the lowest surface energy and the polymer having the highest surface energy is 5 mN / m or more. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012252323-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101909288-B1 |
| priorityDate | 2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 383.