http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008034864-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8382f19a5bb23f13b53ac198ffadc45b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55376e1837da0b73561c2a0779c62c21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c5d56c6c033d9fd7b104c7056105aba |
| publicationDate | 2008-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008034864-A |
| titleOfInvention | Aqueous dispersion for chemical mechanical polishing |
| abstract | The present invention provides an aqueous dispersion for chemical mechanical polishing that can be polished at a sufficient speed without causing scratches on the surface to be polished in polishing copper or the like. An aqueous dispersion containing a polymer or copolymer particle having a crosslinked structure and having a functional group capable of forming a cation in the molecule and water is obtained. A polymer having a functional group capable of forming a cation can be produced by polymerizing methyl methacrylate or the like using an azo polymerization initiator having this specific functional group. Moreover, it can also produce | generate by polymerizing methyl methacrylate etc. using said polymerization initiator in presence of polystyrene etc. Furthermore, a copolymer having a functional group capable of forming a cation is produced by copolymerizing a monomer having a specific functional group such as 3-amino-2-hydroxypropyl methacrylate with methyl methacrylate or the like. be able to. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005472-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013520831-A |
| priorityDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 108.