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filingDate 2006-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1b71d0b212b8a18ab126f3c3f2034a5
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publicationDate 2008-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008032840-A
titleOfInvention Positive resist composition and resist pattern forming method
abstract A positive resist composition and a resist pattern forming method capable of forming a resist pattern having a good shape are provided. A positive resist composition comprising a resin component (A) and an acid generator component (B), wherein the component (A) comprises a structural unit (a1) derived from hydroxystyrene, A positive resist composition comprising a structural unit (a2) having an acetal type acid dissociable, dissolution inhibiting group, and wherein the component (B) is a triarylsulfonium salt type onium salt. [Selection figure] None
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