http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008015162-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2006-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da70f0ee751771143f8486e137fe5bfa |
| publicationDate | 2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008015162-A |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| abstract | Provided are a positive resist composition and a resist pattern forming method capable of achieving excellent MEF. A positive resist comprising a resin component (A) having an acid dissociable, dissolution inhibiting group and increasing alkali solubility by the action of an acid, and an acid generator component (B) that generates acid upon exposure. A resin (A1) having a structural unit (a1) derived from an acrylate ester having a chain-like tertiary alkyl ester type acid dissociable, dissolution inhibiting group, wherein the resin component (A) is a composition; A resin (A2) having a structural unit (a1 ′) derived from an acrylate ester having a cyclic tertiary alkyl ester type acid dissociable, dissolution inhibiting group and not having the structural unit (a1). And the acid generator component (B) has the following general formula (I): [R 4 is an alkyl group having 3 carbon atoms or a fluorinated alkyl group having 3 carbon atoms. ] The positive resist composition characterized by containing the onium salt (B1) which has an anion represented by this. [Chemical 1] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012123401-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009244426-A |
| priorityDate | 2006-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 236.