http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008003316-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a16e2fa556744225f7c2bba36087e7f |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-22 |
filingDate | 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d56192b3365d178ad15ba51a360a518 |
publicationDate | 2008-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2008003316-A |
titleOfInvention | Photosensitive resin composition, pattern manufacturing method, and electronic component |
abstract | The present invention provides a photosensitive resin composition, a method for producing a pattern, and an electronic component, in which physical properties of a cured film are comparable to those obtained by curing at a high temperature. A photosensitive resin composition contains (a) a polybenzoxazole precursor having a repeating unit represented by the general formula (I), (b) a photosensitive agent, and (c) a solvent. [Chemical 1] (In the formula, U or V represents a divalent organic group, and at least one of U and V is a group including an alicyclic ring structure having 3 to 20 carbon atoms, and 2 included in the alicyclic ring structure. The configuration at the two bonds formed by two carbons and the element on the main chain of the polybenzoxazole precursor bonded to each of these two carbons is the total number of repeating units of general formula (I) 30% or more is anti-type.) [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008102890-A1 |
priorityDate | 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 237.