http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008003316-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a16e2fa556744225f7c2bba36087e7f
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-22
filingDate 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d56192b3365d178ad15ba51a360a518
publicationDate 2008-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2008003316-A
titleOfInvention Photosensitive resin composition, pattern manufacturing method, and electronic component
abstract The present invention provides a photosensitive resin composition, a method for producing a pattern, and an electronic component, in which physical properties of a cured film are comparable to those obtained by curing at a high temperature. A photosensitive resin composition contains (a) a polybenzoxazole precursor having a repeating unit represented by the general formula (I), (b) a photosensitive agent, and (c) a solvent. [Chemical 1] (In the formula, U or V represents a divalent organic group, and at least one of U and V is a group including an alicyclic ring structure having 3 to 20 carbon atoms, and 2 included in the alicyclic ring structure. The configuration at the two bonds formed by two carbons and the element on the main chain of the polybenzoxazole precursor bonded to each of these two carbons is the total number of repeating units of general formula (I) 30% or more is anti-type.) [Selection figure] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008102890-A1
priorityDate 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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