| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-466
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-095 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-466
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2004-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007514275-A |
| titleOfInvention |
Plasma processing apparatus and plasma processing method |
| abstract |
A plasma processing apparatus (10) for processing a plurality of substrates (26) using plasma. The processing chamber (12) of the plasma processing apparatus usually has at least a pair of electrodes (24) oriented in the vertical direction, and a substrate (26) is disposed between the pair of electrodes (24) for plasma processing. Is done. Each electrode (24) has perforated plates (42, 50) that allow horizontal process gas and plasma flow, thereby improving plasma uniformity. An effective treatment method is defined for removing thin polymer regions, such as burrs or perforated debris, attached to and protruding from the polymer substrate (26). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009295580-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10109448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018062260-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015146317-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101695632-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160095654-A |
| priorityDate |
2003-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |