| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0108 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2012 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2004-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007513509-A |
| titleOfInvention |
Large area lithography devices and methods |
| abstract |
Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation-polymerizable fluid (14). The apparatus is structured as described above, a first main part (101) and a second main part (102) having opposing surfaces (104, 105), means for adjusting the spacing (115) between the main parts, Support means (106) for supporting the template and the substrate in a parallel parallel relationship with each other in the space such that the surface facing the surface layer is configured to emit radiation into the space. A radiation source (110). The cavity (115) has a first wall that includes a flexible membrane (113) configured to engage the template or substrate and provides an adjustable overpressure to the media present in the cavity. Means for applying (114, 116) are provided to obtain a force that is evenly distributed over the entire contact surface between the substrate and the template. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015195409-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016524173-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012147958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012147958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007335647-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013532369-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11020894-B2 |
| priorityDate |
2003-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |