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filingDate 2004-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007503623-A
titleOfInvention Compact confocal optical device, system and method
abstract A confocal optical device is disclosed. The apparatus includes a three-axis scanning mirror capable of performing a three-dimensional scan of the object. In particular, the scanning mirror is provided with a variable reflection thin film to which two members arranged in an annular gimbal are attached, so that rotation can be obtained around two orthogonal axes. A variable thin film that can also be placed in another suitable location within the device is used to control the focal spot of the light beam propagated from the device to the object being scanned. Various methods associated with the confocal device are also described. [Selection] Figure 2
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