http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007335550-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-5446 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-5448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-54426 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-544 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2006-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27089f68e9298862a802033cdd44ba44 |
| publicationDate | 2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007335550-A |
| titleOfInvention | Semiconductor device |
| abstract | PROBLEM TO BE SOLVED: To provide a semiconductor device having a probing deviation detection pattern that has a small occupation area and can detect a direction in addition to a positional deviation amount. SOLUTION: Two probing displacement detection patterns are arranged in pairs in a scribe area adjacent to an IC chip. The probing misalignment detection pattern includes an inner conductor formed on a concentric circle and an outer conductor disposed at a minute interval from the inner conductor. The structure was divided. By these means, when a misalignment of the needle occurs during probing, a semiconductor device in which a probing misalignment detection pattern capable of detecting the misalignment direction is formed with a small occupied area can be obtained. [Selection] Figure 1 |
| priorityDate | 2006-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 21.