http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007335520-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7508594c3e3d5b799c9e6ead61fc6260 |
| publicationDate | 2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007335520-A |
| titleOfInvention | Dicing apparatus and dicing method |
| abstract | 【Task】 To provide a dicing apparatus and a dicing method that reduce the number of spindles and at the same time reduce the spindle movement axis, thereby improving productivity and reducing the space occupied by the apparatus. [Solution] A spindle 2 having rotating shafts 15A and 15B to which blades 21 and 21 for cutting the workpiece W are attached at both ends, and a work table 4A and 4B on which the workpiece W is sucked and placed and moved relative to the blades 21 and 21. And the X guides 7A, 7B, Y guide 5 and Z guide 6 for relatively moving the work tables 4A and 4B and the spindle 2, thereby reducing the number of spindles and simultaneously reducing the spindle guide means. Productivity can be improved and the space occupied by the equipment can be reduced. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008084887-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I572438-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008288257-A |
| priorityDate | 2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 |
Total number of triples: 15.