http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007333881-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 |
| filingDate | 2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f78bc8e18a2c435657140bdbc27b375 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29ff8364949f8ce9eb0154f8a2968a27 |
| publicationDate | 2007-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007333881-A |
| titleOfInvention | Method for manufacturing antireflection structure, and method for manufacturing mold, glass molding, or resin molding using antireflection structure |
| abstract | A method for manufacturing an antireflection structure easily and inexpensively is provided. An X-ray photosensitive film is formed on a substrate. A plurality of granular bodies 12 that transmit X-rays are arranged on the X-ray photosensitive film 11 at a pitch equal to or less than the wavelength of the light that is prevented from being reflected by the light reflection preventing uneven structure 3. An X-ray shielding film 14 including an X-ray shielding material is formed on the plurality of arranged granules 12 so as to include the plurality of granules 12. The X-ray photosensitive film 11 is patterned into a predetermined pattern by developing after irradiating the X-ray photosensitive film 11 with X-rays from above the X-ray shielding film 14. The substrate 10 is etched from above the patterned X-ray photosensitive film 11 to form the light reflection preventing concavo-convex structure 3 on the substrate 10 to obtain an antireflection structure. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011099500-A1 |
| priorityDate | 2006-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.