| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
2007-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a86e8ffcf76180ff24d38544ac2dc515 |
| publicationDate |
2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007314878-A |
| titleOfInvention |
Delivery device |
| abstract |
A delivery device is provided. A delivery device is provided for delivering a solid precursor compound in a gas phase to a reactor. Such devices include a precursor composition of a solid precursor compound with a layer of filler disposed thereon. Also provided is a method for transferring a carrier gas saturated with a precursor compound and sending it into such a CVD reactor. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009267388-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015145907-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009123117-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015145907-A1 |
| priorityDate |
2006-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |