| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2006-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf2ce698300ab33b54df4ed3ec481138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98edd2c343b9fe70f3c9ec088290e7e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1050473deca043e9b0ba30aa3e4eeda |
| publicationDate |
2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007314614-A |
| titleOfInvention |
Polyimide precursor copolymer, varnish and positive photosensitive resin composition containing the same, polyimide copolymer, protective film for semiconductor element containing the same, and method for producing fine pattern of polyimide copolymer-containing film |
| abstract |
The present invention provides a technique relating to a polyimide precursor copolymer or a polyimide copolymer that achieves a high balance of transparency, high elastic modulus, and excellent solvent solubility. [Solution] A first acid dianhydride having a specific structure, a second acid dianhydride having a specific structure different from the first acid dianhydride, and one or more having one or two aromatic rings A polyimide precursor copolymer obtained by copolymerizing diamine. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016147490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007314583-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013105834-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016147490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008091415-A |
| priorityDate |
2006-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |