http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007314366-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1476752f2420c8f8eb53464cf7fc922b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-46 |
| filingDate | 2006-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a7065f7bb106d0e138e358b98c95d97 |
| publicationDate | 2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007314366-A |
| titleOfInvention | Thin film forming composition and dielectric thin film |
| abstract | It is an object of the present invention to make it possible to form a thin film having good storage stability and good film quality. A composition for forming a thin film contains barium carboxylate such as barium ethylhexanoate, strontium carboxylate such as strontium ethylhexanoate, and titanium carboxylate such as titanium 2-ethylhexanoate, and further required. According to the above, each containing molar ratio x, y, z and w of the barium component, the strontium component, the calcium component and the titanium component is x + y + z = 1, 0.85 ≦ w. ≦ 1.2 is satisfied. A dense dielectric thin film can be obtained by spin coating using this thin film forming composition. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010189221-A |
| priorityDate | 2006-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.