http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007302955-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515
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filingDate 2006-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c83423d3e9269b484faa0f7ebfbc93b
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publicationDate 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007302955-A
titleOfInvention Method for forming a film on the inner surface of a metal structure
abstract Provided is a method capable of forming various coatings such as a good corrosion-resistant coating without defects on the inner surface of a metal structure having a hollow portion such as a metal tube and a metal container by a simple treatment method. A method of forming a film on the inner surface of a metal structure, comprising: The metal structure to be processed has a hollow portion surrounded by a metal material and has an opening. The method of forming the thin film is to exhaust the inside with the hollow portion of the metal structure being sealed, and then introducing the raw material gas, applying a pulsed alternating voltage to the metal material portion constituting the metal structure, A method of forming a film on the inner surface of a metal structure, wherein plasma is generated in a hollow portion of the metal structure and a film is formed by a plasma CVD method. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009235469-A
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type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 24.