| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G51-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-18 |
| filingDate |
2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_992841a05675e180a09a662c9387b05e |
| publicationDate |
2007-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007290958-A |
| titleOfInvention |
Method for producing metal oxide film |
| abstract |
A main object of the present invention is to provide a method for producing a metal oxide film capable of adjusting film quality such as crystallinity and crystal structure of the metal oxide film. The present invention includes two or more types of metal sources having the same metal element and different non-metal parts, and at least one of the two or more types of metal sources independently forms a metal oxide film. By using a metal oxide film forming solution, which is a possible metal source capable of forming a single film, and contacting the metal oxide film forming solution with a substrate heated to a temperature equal to or higher than the metal oxide film forming temperature. The above problem is solved by providing a method for producing a metal oxide film, which comprises forming a metal oxide film on the substrate. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014162684-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012147219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012230776-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009166324-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010111522-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009120410-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009224774-A |
| priorityDate |
2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |