http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007287948-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2006-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23019546b69e67105da3666ccf0ffae2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_164526dd737c1aef9bb90034a3de8415 |
| publicationDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007287948-A |
| titleOfInvention | Surface processing method and surface processed product |
| abstract | The surface smoothness of a workpiece is easily increased to a high level. In a surface processing method in which a reactive substance 2 having reactivity with a workpiece is brought into contact with the surface of the workpiece 1, and these are reacted to perform surface processing of the workpiece. As a reactive substance, a reactive substance 2 (reactive substance activated by plasma irradiation) that is reactive to the workpiece 1 under heating conditions is used, and the reactive substance 2 and the workpiece are used. The above reaction is carried out at the temperature at which 1 reacts. [Selection] Figure 1 |
| priorityDate | 2006-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.