http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007286401-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f0184dc3c6f71914099e230cb4eae8d6 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 |
| filingDate | 2006-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_260794fed50ad823d9fe5fb1b80c5863 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91e3fb4aab247f79fa1b5724927a5b71 |
| publicationDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007286401-A |
| titleOfInvention | Liquid crystal device manufacturing apparatus and liquid crystal device manufacturing method |
| abstract | An apparatus for manufacturing a liquid crystal device is provided that prevents an inorganic alignment film having a desired shape from being obtained due to plasma and prevents formation of a favorable inorganic alignment film. An apparatus 1 for manufacturing a liquid crystal device according to the present invention forms an inorganic alignment film by forming a film formation chamber 2 and an alignment film material on the substrate W by sputtering in the film formation chamber 2. The sputtering apparatus 3 includes a pair of targets 5a and 5b facing each other across the plasma generation region, an opening 3a that discharges the sputtered particles 5p from the plasma generation region, and the plasma generation region. And an electron constraining means (magnetic field generating means 16a, 16b) for capturing or reflecting the contained electrons, and the opening 3a is located at a position where the sputtered particle 5p is incident on the substrate W from an oblique direction. Has been placed. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9249496-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989808-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009276587-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008072528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010237714-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010014969-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010020092-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4640457-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4561871-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010020094-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010250352-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4631940-B2 |
| priorityDate | 2006-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.