http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007284312-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B19-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-00 |
| filingDate | 2006-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4ff845cccf25be696e891402d9fa676 |
| publicationDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007284312-A |
| titleOfInvention | Manufacturing method of composite oxide film, composite obtained by the manufacturing method, dielectric material including the composite, piezoelectric material, capacitor, piezoelectric element, and electronic device |
| abstract | A method for producing a complex oxide film having a high relative dielectric constant and a film thickness that can be arbitrarily controlled without using complex and large-scale equipment, a complex having the complex oxide film on a substrate surface, and the complex Provided are a dielectric material or a piezoelectric material including a body, a capacitor or a piezoelectric element including these materials, and an electronic device including these elements. An oxide film on a surface of a substrate containing a first metal element is removed, and then the substrate from which the oxide film has been removed is subjected to at least one of evaporation, sublimation, and thermal decomposition under atmospheric pressure or reduced pressure. A solution containing a basic compound that becomes a gas by means and ions of the second metal element is reacted to obtain a composite oxide film containing the first metal element and the second metal element on the surface of the substrate. [Selection figure] None |
| priorityDate | 2006-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.