| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0d4c86e27dacbae07234cec1a12ef584 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2007-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d00e34368e1ec14eb26307a222e29df4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebae93bd3af82235ca2f034b08c7515e |
| publicationDate |
2007-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007273454-A |
| titleOfInvention |
Extremely ultraviolet generator using electrically operated gas discharge |
| abstract |
Improved control of layer thickness when applying molten metal to an electrode surface to provide better protection against uncontrolled spread of molten metal to the environment associated with increased electrode rotation speed give. In particular, it is possible to increase the rotation speed to such an extent that the discharge area where the electrodes are not consumed is always located in the discharge area at a repetition rate of several kilohertz. An edge region to be painted has at least one receiving region extending along and surrounding the electrode edge on the electrode surface, the receiving region configured to be wetted with molten metal, For reproducible applications, this is achieved by the liquid supply nozzle being guided to the receiving area. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011507206-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011082473-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010263210-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014089880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011527503-A |
| priorityDate |
2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |