http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007266075-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 2006-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12a8dc53697a9aa533b75f401ecb5452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51889b3bbdd0ad4c703d1be983e955e0 |
publicationDate | 2007-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007266075-A |
titleOfInvention | Polishing liquid for metal |
abstract | Provided is a metal-polishing liquid having a rapid chemical mechanical polishing rate, less dishing, improved flatness, improved copper / tantalum selectivity, and capable of producing an LSI. The present invention includes a 1,2,3-triazole derivative having a specific substituent and an oxidizing agent. |
priorityDate | 2006-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 338.