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publicationDate 2007-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007262381-A
titleOfInvention Beam detection member and beam detector using the same
abstract The position and intensity distribution of a synchrotron radiation beam, a soft X-ray beam, and the like, as well as their temporal changes, can be detected stably for a long period of time with high accuracy, and are lower in cost than conventional detection devices. And a beam detector using the same. A beam detection member 2 for detecting a position and intensity of a beam, and a beam irradiation unit 6 irradiated with the beam 7 includes at least silicon (Si), nitrogen (N), lithium (Li), One or more elements (X) selected from beryllium (Be), boron (B), phosphorus (P), sulfur (S), nickel (Ni), and vanadium (V), X / C = 0 The polycrystalline diamond (C) film 4 containing 1 to 1000 ppm has a light emitting function of emitting light 8 and 8a when the polycrystalline diamond film 4 is irradiated with the beam 7. The beam detector 1 is composed of the beam detection member 2 and the light emission observation means 3 and 3a for observing the light emission phenomenon. [Selection] Figure 3
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