| abstract |
Provided is a film forming composition suitable as an interlayer insulating film in an electronic device because the formed film is uniform, no impurities are deposited, and a low dielectric constant and a high metal diffusion barrier property are obtained. . A film-forming composition comprising an antioxidant such as a phenol-based antioxidant, a phosphorus-based antioxidant, an amine-based antioxidant, an ionic antioxidant, or a lactone-based antioxidant. object. [Selection figure] None |