http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007254810-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5c121269689cbab9b3a4548b15caf3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B35-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6395945eec8dfa5d8ea92dcb9e074b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53ce284d0a55bd9fa94f6a275604b9c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9af91041612dea66e50d6bb830013ab |
| publicationDate | 2007-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007254810-A |
| titleOfInvention | Boron-carbon-nitrogen-oxygen compound film forming method, and film, substrate, and device obtained by the above method |
| abstract | [PROBLEMS] To provide a compound having excellent electrical characteristics such as band gap and insulating properties, and excellent optical characteristics such as high visible light transmittance, at a temperature of less than 250 ° C. that can be tolerated by a flexible organic material substrate or a glass substrate. The film is formed at a temperature of Nitrogen atoms are mainly excited using plasma, and the excited nitrogen atoms are reacted with boron atoms, carbon atoms, and oxygen atoms to form boron carbon nitrogen oxygen on a substrate of less than 250 ° C. in a deposition chamber. A film formation method of a boron carbon nitrogen oxygen compound characterized by depositing a compound. The boron carbon nitrogen oxygen compound contains oxygen at 20 at% or more. The method for forming a boron carbon nitrogen oxygen compound, wherein the substrate is a paper substrate, a synthetic resin substrate, a flexible organic material substrate, or a glass substrate. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150104037-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9613798-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101676558-B1 |
| priorityDate | 2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.