| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6638ac6b1020cd2c62d09d748bc1ab9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ba5f7ea5aeec1c13a8d53826af74115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9019c0ce5cb7b82c85e121f6cac86dce |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcf450c6561018fbb057477b1088c2b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bbb5c83d85df5a504a5424089167997
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_536386bdd8e0ccdd5e3109ed5a6898c8 |
| publicationDate |
2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007246354-A |
| titleOfInvention |
Thin film substrate manufacturing method |
| abstract |
A simple and inexpensive method for producing a SCAM (ScAlMgO4: scandium / aluminum / magnesium / oxide) crystal substrate is provided. A thin film deposition substrate 1 of sapphire (0001) is introduced into a vacuum chamber. After the introduction, a flux thin film 2 is formed on the thin film deposition substrate 1 by a pulsed laser deposition method using a flux as a target. The thin film deposition substrate 1 is heated on the thin film deposition substrate while heating the thin film deposition substrate 1 at a temperature at which the flux melts, with the SAM component including scandium (S), aluminum (A), and magnesium (M) as a target. The SCAM thin film 3 having the SCAM single crystal film 4 is manufactured by laminating the thin film 3 of the SAM component. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019210196-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101745979-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017115852-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017119597-A |
| priorityDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |