| abstract |
【Task】 To provide an efficient dicing apparatus that does not lower the lupus. [Solution] A shielding plate 71 as a first shielding plate located between the processing unit 20 and the imaging means 10, and a first plate provided opposite to the shielding plate 71 on the same axis as the movement axis on which the shielding plate 71 moves. By providing the shielding plate 73 as the second shielding plate, the imaging unit 10 can be reliably shielded from the processing unit 20 in a short time, and efficient dicing can be performed without reducing the throughput. [Selection] Figure 5 |