http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007234984-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2006-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb5c90862ff13bc5e23ee8bab61b5f6d |
| publicationDate | 2007-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007234984-A |
| titleOfInvention | Photo development method |
| abstract | A photo-development method that improves dimensional uniformity and reduces costs. A first developing step of applying a developer 30 on a resist 20 exposed in a predetermined shape and removing the developer 30; and a developer 30 used in the first developing step on the resist 20; The photo-development method comprising a second development step of applying a different developer 31 and removing the developer 31 improves the dimensional uniformity and shortens the development time, improving the working efficiency and reducing the cost. Reduce. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016058712-A |
| priorityDate | 2006-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.