http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007220891-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3765 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37fd769a199d2731476a11592d2ad505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bcc16ccd04f99589d61419b40ea58c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed9fa2b763a1be7df344c0d6046d9761 |
| publicationDate | 2007-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007220891-A |
| titleOfInvention | Post-CMP processing liquid and method for manufacturing semiconductor device using the same |
| abstract | PROBLEM TO BE SOLVED: To provide a post-CMP processing liquid capable of efficiently removing substances adhered to a wiring layer or an insulating film surface. SOLUTION: Water, resin particles having a concentration of 0.01 wt% or more and 1 wt% or less, having a carboxyl group and a sulfonyl group on the surface, a primary particle diameter of 10 nm or more and 60 nm or less, and a carboxyl group-containing first particle. This is a post-CMP processing solution containing one surfactant, a second surfactant having a sulfonyl group, and tetramethylammonium hydroxide. The pH is 4 or more and 9 or less, and the polishing rate of the insulating film and the conductive film is 10 nm / min or less. [Selection figure] None |
| priorityDate | 2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.