http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007220733-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22 |
| filingDate | 2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f78bc8e18a2c435657140bdbc27b375 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29ff8364949f8ce9eb0154f8a2968a27 |
| publicationDate | 2007-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007220733-A |
| titleOfInvention | X-ray lithography mask, method for producing the same, method for producing anti-reflection structure using the same, and method for producing a mold, glass molding, or resin molding using the anti-reflection structure |
| abstract | A mask for X-ray lithography that can be manufactured inexpensively and easily is provided. A mask for X-ray lithography 1 is for manufacturing a light reflection preventing structure having a light reflection preventing structure by X-ray lithography. The X-ray lithography mask 1 includes a first substrate 10 that transmits X-rays and an X-ray shielding layer 2. The X-ray shielding layer 2 includes a plurality of X-ray shielding granules 11 that shield X-rays arranged on the first substrate 10 along the plate surface direction. The plurality of X-ray shielding granules 11 are arranged at a pitch equal to or less than the wavelength of light whose reflection is suppressed by the light reflection preventing structure. [Selection] Figure 1 |
| priorityDate | 2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.