http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007219384-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
filingDate | 2006-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7819d9f367b84858d4460c06df6db8f |
publicationDate | 2007-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007219384-A |
titleOfInvention | Pattern formation method |
abstract | An object of the present invention is to provide a pattern forming method that can reduce pressure distribution unevenness at the time of pressure bonding, hardly generate wrinkles and bubbles, and can form a high-definition pattern. A pattern forming material having at least a photosensitive layer on a support is pressure-bonded onto a substrate using a pressure-bonding roll having a rotation axis direction width of 120 cm or less, and is laminated on the substrate. Is exposed. A mode in which two or more pressure-bonding rolls on the side in contact with the pattern forming material are aligned in parallel, a mode in which two or more pressure-bonding rolls on the side not in contact with the pattern forming material are aligned in parallel, and the rotation axis width of the pressure-bonding roll is X, An embodiment in which Y / X is 0.5 or more and 1 or less, where Y is a width in a direction substantially orthogonal to the conveyance direction of the pattern forming material, is preferable. [Selection] Figure 35 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102196867-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016050311-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160026699-A |
priorityDate | 2006-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 996.