http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007212479-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 |
| filingDate | 2007-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_571681b1d6dac5d9e2c85d405e5eb30d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1320107288dbfe6993e80f96972ada6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a441e83c52b0040a6792aba1b948308d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b65198ea3b6b2acdacd5aea8817bf7e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08440c0dc5fccb85ff3161ff49be50c1 |
| publicationDate | 2007-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007212479-A |
| titleOfInvention | Defect inspection apparatus and method |
| abstract | PROBLEM TO BE SOLVED: To provide scratches having various shapes generated on a surface of a workpiece (for example, an insulating film on a semiconductor substrate) when polishing or grinding such as CMP is performed in semiconductor manufacturing or magnetic head manufacturing. It is an object of the present invention to provide a defect inspection apparatus and method capable of discriminating and inspecting adhered foreign substances. SOLUTION: The present invention performs epi-illumination and oblique illumination with substantially the same light flux on scratches or foreign matters generated on the surface of a polished or ground insulating film, and during the epi-illumination and oblique illumination. It is characterized in that the shallow scratches and the foreign matter are discriminated based on the correlation such as the ratio of the intensity of scattered light generated from the shallow scratches and the foreign matter. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6918434-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112945131-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112945131-B |
| priorityDate | 2007-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.