http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007208110-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate | 2006-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa7de2fce08960a0a274fc7a5cfc9a44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2261689ad377ef0bd99dd7a5af204765 |
| publicationDate | 2007-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007208110-A |
| titleOfInvention | Crystallizer, crystallizer vibration evaluation method, and crystallizer optical base design method |
| abstract | In a crystallization apparatus, submicron positioning is performed with high accuracy, vibration of the vibration isolation device is reduced, and rigidity of an optical base portion is increased. Vibration of an anti-vibration apparatus is reduced by performing feedforward control of a surface plate that supports the substrate stage in accordance with driving of the substrate stage. Also, by evaluating the optical base part by obtaining the displacement when moving the optical base part with the same movement as the movement of the surface plate when driving the substrate stage, by repeating the design of the optical base part based on this evaluation, Increase the rigidity of the optical base. The crystallization apparatus 1 includes an optical base portion 4 that supports an optical system, a surface plate 5 that supports and fixes the substrate stage 3 and the optical base portion 4, and a vibration isolation device 6 that supports the surface plate 5. The vibration reduction by the vibration isolator 6 is improved by performing feedforward control of the vibration isolator 6 based on the operation of the substrate stage 3 during the operation of the substrate stage 3. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013131754-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8588269-B2 |
| priorityDate | 2006-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.