http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007205919-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02D30-70 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
filingDate | 2006-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41abccd6e0bf2cda9dc09aa99125a864 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35ec15ada6ccb53d43abb1184878d4a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c864f34d298c68fe4f0472d42aff25bb |
publicationDate | 2007-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007205919-A |
titleOfInvention | Circuit board device for wafer inspection, probe card, and wafer inspection device |
abstract | A circuit board device for wafer inspection for collectively inspecting a large number of integrated circuits, which can be manufactured at a low cost, and the circuit board device for wafer inspection Provided are a probe card and a wafer inspection apparatus. A connector unit in a connector device, comprising: a substrate body comprising a wiring board having connection electrodes on the surface; and a connector device provided on the surface of the substrate body, wherein a plurality of connector units are stacked. Each has an anisotropic conductive elastomer sheet, and a pitch conversion board that is arranged on the anisotropic conductive elastomer sheet and includes a wiring board having a connection electrode on the front surface and a terminal electrode on the back surface, Each of the connection electrode of the substrate body and the connection electrode of the pitch conversion board is electrically connected to the terminal electrode of the pitch conversion board arranged immediately above via an anisotropic conductive elastomer sheet. [Selection] Figure 2 |
priorityDate | 2006-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.