| abstract |
In an imprint technique, an accurate fine pattern can be transferred by closely contacting a mold and a transfer object while avoiding deformation of the mold. An imprint chamber (101), an auxiliary chamber (108) disposed on a surface facing the mold (107) of the imprint chamber, a pipe (111) connecting the two, and a fluid between the two chambers in the middle of the pipe are controlled. This is achieved by an imprint apparatus having a valve 112 for performing the above operation, a vacuum pump 115 as an exhaust mechanism for each chamber, and a moving mechanism 102 for the transfer target 105. With this apparatus, the pressure in the auxiliary chamber can be arbitrarily adjusted in accordance with the pressure in the imprint chamber, and deformation of the mold due to the pressure difference can be avoided. [Selection] Figure 1 |