http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007190833-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
filingDate | 2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96fd1faab0a2260ffe25ff102d3b8638 |
publicationDate | 2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007190833-A |
titleOfInvention | Method for manufacturing liquid jet head |
abstract | A method of manufacturing a liquid jet head capable of reliably preventing ejection failure such as nozzle clogging due to foreign matter is provided. A step of forming a piezoelectric element on one surface side of a flow path forming substrate via a vibration plate, a step of removing a vibration plate in a region to be a communication portion to form a through portion, an adhesion layer and a metal Forming a lead electrode composed of a layer, and a step of sealing the through portion with a discontinuous wiring layer consisting of an adhesion layer and a metal layer, and joining the reservoir forming substrate to the flow path forming substrate A step of wet etching the flow path forming substrate to form a liquid flow path, and sequentially removing the adhesion layer and the metal layer constituting the wiring layer by wet etching to connect the reservoir portion and the communication portion. And forming a penetrating portion in the vibration plate, forming at least a part of the penetrating portion, tilting with respect to the surface of the elastic film and having an inclination angle with respect to the surface of the elastic film on a part of the inner surface Steep slope of 45 ° or more Forming a through hole having a. [Selection] Figure 4 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011056939-A |
priorityDate | 2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.