http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007184517-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e4d965207de3a985d7f49e52b3be483 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42384 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78609 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 2006-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_089cbee78b756f45d73bfceb1a66caa6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d7ff4328abc99db71b83d8c371c6180 |
| publicationDate | 2007-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007184517-A |
| titleOfInvention | Alternating source / drain and thin channel TFT structure and method of manufacturing the same |
| abstract | An alternating source / drain that simplifies the conventional method by reducing the number of mask steps, further suppressing the electric field near the drain junction and reducing leakage current to achieve good results A method of manufacturing a thin channel TFT structure is provided. A method of manufacturing a TFT structure according to the present invention includes (1) laminating an a-Si layer on a substrate, and then applying a general photolithography step and an RIE etching step to obtain a high region and a low region. A remaining width of the etched a-Si thin channel is about 5 to 200 nm, and further annealing to change the a-Si to poly-Si (02), (2) A step of forming a gate region (05), a source / drain region (07), and a channel, (3) a step of applying implantation, and (4) a step of applying a junction. [Selection] Figure 1 |
| priorityDate | 2006-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.