| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54 |
| filingDate |
2006-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c41532583b9cb810e1512b884324d060
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b901326979d3e1b4690edcb5a5145e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4081380df1eaf83970abd1c9ea2660f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea1000f3d88a6401215a2d3cb4fe6edc |
| publicationDate |
2007-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007183591-A |
| titleOfInvention |
Mask blank and gradation mask |
| abstract |
A main object of the present invention is to provide a gradation mask that is advantageous for forming a pattern and simplifies the manufacturing process of a display device. The present invention relates to a mask blank having a transparent substrate and a translucent film formed on the transparent substrate and having a transmittance adjusting function, the translucent film having a transmittance at a wavelength of 365 nm. The above object is achieved by providing a mask blank characterized in that the transmittance is greater than the transmittance at a wavelength of 300 nm, and the difference between the transmittance at a wavelength of 365 nm and the transmittance at a wavelength of 300 nm is within a predetermined range. To do. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11143949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019211500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009116268-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009258357-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007178649-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013061670-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009187032-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009282290-A |
| priorityDate |
2005-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |