http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007165770-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b434d7df701edeee249e68337cfe859e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0853 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2005-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77576b39b1d72c3a2bb4d80014dcde2f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0225e279bfa6d2401d52e5ad699e1db6 |
| publicationDate | 2007-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007165770-A |
| titleOfInvention | Laser crystallization apparatus and crystallization method |
| abstract | A semiconductor film having a large crystal grain size is formed by irradiating a laser beam having a predetermined light intensity distribution onto a substrate positioned at high speed and with high precision to melt and crystallize the semiconductor film. It is to provide a possible high-throughput laser crystallization apparatus and crystallization method. A laser crystallization apparatus that solves the above problems includes a laser light source that generates laser light, and a phase shifter that modulates the laser light to give a predetermined light intensity distribution. A laser crystallization apparatus that irradiates a thin film provided on a substrate with the modulated laser beam and melts and crystallizes the thin film, and holds a mark provided on the substrate and the substrate A substrate holding stage that moves in a predetermined direction, a mark measuring unit that measures a time during which the mark passes a predetermined position during the movement of the substrate holding stage, and the laser beam based on the measurement time by the mark measuring unit Signal generating means for generating a trigger signal for instructing the irradiation. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012084620-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009246349-A |
| priorityDate | 2005-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.