http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007165566-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2005-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2188cce85f627e039f1fa290a99022d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23b532ba542d97351d51a9795e392429 |
| publicationDate | 2007-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007165566-A |
| titleOfInvention | Polishing liquid for metal and polishing method |
| abstract | A substrate having an insulating film, a conductor film, and a barrier metal film can be continuously polished with the same metal polishing liquid, and the flatness of the polished surface after polishing is good, and the scratch is obtained. The polishing method which can reduce generation | occurrence | production of a metal, and the metal polishing liquid used for it are provided. A metal polishing liquid used for chemical mechanical planarization of a substrate for a semiconductor integrated circuit, which contains the following components (1), (2), (3) and (4), and contains copper or copper: It is used for polishing a wiring made of an alloy including the barrier metal film. (1) Particles having a volume average particle diameter determined by a dynamic light scattering method in the range of 60 to 150 nm. (2) Particles having a volume average particle diameter determined by a dynamic light scattering method in the range of 10 to 50 nm. (3) Oxidizing agent. (4) Aminodicarboxylic acid. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9796881-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009005143-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102352187-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013062516-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013133198-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009059908-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609541-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101689494-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5287720-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102352187-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901002-B2 |
| priorityDate | 2005-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 300.